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YAMATO Masayuki
Department Research Institutes and Facilities, Research Institutes and Facilities Position Professor |
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| Article types | Original article |
| Language | English |
| Peer review | Non peer reviewed |
| Title | Development of microfabrication technology with maskless photolithography device using LCD projector |
| Journal | Formal name：Journal of Robotics and Mechatronics ISSN code：0915-3942/1883-8049 |
| Volume, Issue, Page | 22(5),pp.608-612 |
| Author and coauthor | Itoga Kazuyoshi†, Kobayashi Jun, Yamato Masayuki, Okano Teruo* |
| Publication date | 2010/10 |
| DOI | 10.20965/jrm.2010.p0608 |