KOBAYASHI Jun
Department Research Institutes and Facilities, Research Institutes and Facilities Position Assistant Professor |
|
Article types | Original article |
Language | English |
Peer review | Non peer reviewed |
Title | Development of microfabrication technology with maskless photolithography device using LCD projector |
Journal | Formal name:Journal of Robotics and Mechatronics ISSN code:0915-3942/1883-8049 |
Volume, Issue, Page | 22(5),pp.608-612 |
Author and coauthor | Itoga Kazuyoshi†, Kobayashi Jun, Yamato Masayuki, Okano Teruo* |
Authorship | 2nd author |
Publication date | 2010/10 |
DOI | 10.20965/jrm.2010.p0608 |