KOBAYASHI Jun
   Department   Research Institutes and Facilities, Research Institutes and Facilities
   Position   Assistant Professor
Article types Original article
Language English
Peer review Non peer reviewed
Title Development of microfabrication technology with maskless photolithography device using LCD projector
Journal Formal name:Journal of Robotics and Mechatronics
ISSN code:0915-3942/1883-8049
Volume, Issue, Page 22(5),pp.608-612
Author and coauthor Itoga Kazuyoshi†, Kobayashi Jun, Yamato Masayuki, Okano Teruo*
Authorship 2nd author
Publication date 2010/10
DOI 10.20965/jrm.2010.p0608